Patent
US 10,109,746passivation layer
aluminum
Al
titanium
Ti
nickel
Ni
gold
Au
palladium
Pd
platinum
Pt
silicon oxide
SiO₂
alumina
Al₂O₃
p++ heavily doped silicon substrate
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 4 and 5 are graphs f o r comparing characteristics of the graphene transistors of
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
C |
dielectric layer thickness | 90 nm | SiO₂ |
graphene channel length between source and drain | 9 um | C |
doping metal layer thickness | 10 nm | doping metal layer |
doping metal layer width | 2 um | doping metal layer |
first graphene region width | 3 um | C |
doped graphene region width | 2 um | C |
second graphene region length | 4 um | C |
Voltage | 30–30 V | — |
Voltage | 13–23 V | — |
Voltage | 35–40 V | — |
Voltage | 0.5–1.2 V | — |
Pressure | 20–30 atm | — |
Duration | 1–4 hours | — |
Pressure | ≤ 20 atm | — |
Voltage | ≤ 0.3 V | — |
Pressure | ≥ 30 atm | — |
passivation layer
aluminum
Al
titanium
Ti
nickel
Ni
gold
Au
palladium
Pd
platinum
Pt
silicon oxide
SiO₂
alumina
Al₂O₃
p++ heavily doped silicon substrate
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 4 and 5 are graphs f o r comparing characteristics of the graphene transistors of
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
C |
dielectric layer thickness | 90 nm | SiO₂ |
graphene channel length between source and drain | 9 um | C |
doping metal layer thickness | 10 nm | doping metal layer |
doping metal layer width | 2 um | doping metal layer |
first graphene region width | 3 um | C |
doped graphene region width | 2 um | C |
second graphene region length | 4 um | C |
Voltage | 30–30 V | — |
Voltage | 13–23 V | — |
Voltage | 35–40 V | — |
Voltage | 0.5–1.2 V | — |
Pressure | 20–30 atm | — |
Duration | 1–4 hours | — |
Pressure | ≤ 20 atm | — |
Voltage | ≤ 0.3 V | — |
Pressure | ≥ 30 atm | — |
passivation layer
aluminum
Al
titanium
Ti
nickel
Ni
gold
Au
palladium
Pd
platinum
Pt
silicon oxide
SiO₂
alumina
Al₂O₃
p++ heavily doped silicon substrate
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 4 and 5 are graphs f o r comparing characteristics of the graphene transistors of
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
C |
dielectric layer thickness | 90 nm | SiO₂ |
graphene channel length between source and drain | 9 um | C |
doping metal layer thickness | 10 nm | doping metal layer |
doping metal layer width | 2 um | doping metal layer |
first graphene region width | 3 um | C |
doped graphene region width | 2 um | C |
second graphene region length | 4 um | C |
Voltage | 30–30 V | — |
Voltage | 13–23 V | — |
Voltage | 35–40 V | — |
Voltage | 0.5–1.2 V | — |
Pressure | 20–30 atm | — |
Duration | 1–4 hours | — |
Pressure | ≤ 20 atm | — |
Voltage | ≤ 0.3 V | — |
Pressure | ≥ 30 atm | — |
passivation layer
aluminum
Al
titanium
Ti
nickel
Ni
gold
Au
palladium
Pd
platinum
Pt
silicon oxide
SiO₂
alumina
Al₂O₃
p++ heavily doped silicon substrate
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 2 and 3 according to the first embodiment of the present disclosure. 15 FI G 4 shows a graphene transistor which is formed under a condition the same as …
FIGS. 4 and 5 are graphs f o r comparing characteristics of the graphene transistors of
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIGS. 8 and 9, when the input signal V N is OV, Vgs of the first graphene transistor 201 becomes -2V, and Vgs of the second graphene transistor 202 becomes 2V. …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
FIG. 10 is a graph illustrating input and output characteristics of the inverter of 15 FI G S. 8 and 9 according to the second embodiment o f the present …
C |
dielectric layer thickness | 90 nm | SiO₂ |
graphene channel length between source and drain | 9 um | C |
doping metal layer thickness | 10 nm | doping metal layer |
doping metal layer width | 2 um | doping metal layer |
first graphene region width | 3 um | C |
doped graphene region width | 2 um | C |
second graphene region length | 4 um | C |
Voltage | 30–30 V | — |
Voltage | 13–23 V | — |
Voltage | 35–40 V | — |
Voltage | 0.5–1.2 V | — |
Pressure | 20–30 atm | — |
Duration | 1–4 hours | — |
Pressure | ≤ 20 atm | — |
Voltage | ≤ 0.3 V | — |
Pressure | ≥ 30 atm | — |