Patent
US 10,385,390titanium
Ti
palladium
Pd
gold
Au
oxide
nitride
ionic buffer
silicon nitride (LPCVD Si₃N₄)
Si₃N₄
silicon dioxide (SiO₂)
SiO₂
silicon substrate
Si
Ti/Pd/Au metal pad stack
organic layer (nanopore coating)
FIG. 2A shows a top view of the graphene nanopore transistor device, illustrating the geometry of the buried graphene layer according to an embodiment. [0011]
FIG. 3 is a setup of the graphene nanopore transistor device for DNA and/or RNA sequencing according to an embodiment. [0014]
FIG. 4 is a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0015]
FIG. 5 shows a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0016]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 7 illustrates a graph of an ionic current pulse according to an embodiment. [0018]
titanium
Ti
palladium
Pd
gold
Au
oxide
nitride
ionic buffer
silicon nitride (LPCVD Si₃N₄)
Si₃N₄
silicon dioxide (SiO₂)
SiO₂
silicon substrate
Si
Ti/Pd/Au metal pad stack
organic layer (nanopore coating)
FIG. 2A shows a top view of the graphene nanopore transistor device, illustrating the geometry of the buried graphene layer according to an embodiment. [0011]
FIG. 3 is a setup of the graphene nanopore transistor device for DNA and/or RNA sequencing according to an embodiment. [0014]
FIG. 4 is a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0015]
FIG. 5 shows a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0016]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 7 illustrates a graph of an ionic current pulse according to an embodiment. [0018]
titanium
Ti
palladium
Pd
gold
Au
oxide
nitride
ionic buffer
silicon nitride (LPCVD Si₃N₄)
Si₃N₄
silicon dioxide (SiO₂)
SiO₂
silicon substrate
Si
Ti/Pd/Au metal pad stack
organic layer (nanopore coating)
FIG. 2A shows a top view of the graphene nanopore transistor device, illustrating the geometry of the buried graphene layer according to an embodiment. [0011]
FIG. 3 is a setup of the graphene nanopore transistor device for DNA and/or RNA sequencing according to an embodiment. [0014]
FIG. 4 is a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0015]
FIG. 5 shows a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0016]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 7 illustrates a graph of an ionic current pulse according to an embodiment. [0018]
titanium
Ti
palladium
Pd
gold
Au
oxide
nitride
ionic buffer
silicon nitride (LPCVD Si₃N₄)
Si₃N₄
silicon dioxide (SiO₂)
SiO₂
silicon substrate
Si
Ti/Pd/Au metal pad stack
organic layer (nanopore coating)
FIG. 2A shows a top view of the graphene nanopore transistor device, illustrating the geometry of the buried graphene layer according to an embodiment. [0011]
FIG. 3 is a setup of the graphene nanopore transistor device for DNA and/or RNA sequencing according to an embodiment. [0014]
FIG. 4 is a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0015]
FIG. 5 shows a setup of the graphene nanopore transistor device for biomolecule sensing according to an embodiment. [0016]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 6 illustrates a graph of a transistor current pulse according to an embodiment. [0017]
FIG. 7 illustrates a graph of an ionic current pulse according to an embodiment. [0018]