Patent
US 11,201,260doped quantum barrier
Alx1Iny1Ga₁-x1-y1N
undoped quantum well
Alx2Iny2Ga₁-x2-y2N
buffer layer
AlN buffer layer
AlN
N-type current spreading layer
AlGaN current spreading layer
AlGaN
InGaN current spreading layer
InGaN
quantum barrier doped concentration | 1000000000000000000–5000000000000000000 cm⁻³ | Alx1Iny1Ga₁-x1-y1N |
protective GaN cap layer thickness | 30–100 nm | GaN |
electron blocking layer doped concentration | 1000000000000000000–10000000000000000000 cm⁻³ | AlGaN |
electron blocking layer thickness | 0.1–0.5 um | AlGaN |
Thickness | 0–200 nm | — |
Thickness | 20–50 nm | — |
Duration | 10–15 minutes | — |
Duration | 20–30 minutes | — |
LASER ANNEALING OF GAN LEDS WITH REDUCED PATTERN EFFECTS
doped quantum barrier
Alx1Iny1Ga₁-x1-y1N
undoped quantum well
Alx2Iny2Ga₁-x2-y2N
buffer layer
AlN buffer layer
AlN
N-type current spreading layer
AlGaN current spreading layer
AlGaN
InGaN current spreading layer
InGaN
quantum barrier doped concentration | 1000000000000000000–5000000000000000000 cm⁻³ | Alx1Iny1Ga₁-x1-y1N |
protective GaN cap layer thickness | 30–100 nm | GaN |
electron blocking layer doped concentration | 1000000000000000000–10000000000000000000 cm⁻³ | AlGaN |
electron blocking layer thickness | 0.1–0.5 um | AlGaN |
Thickness | 0–200 nm | — |
Thickness | 20–50 nm | — |
Duration | 10–15 minutes | — |
Duration | 20–30 minutes | — |
LASER ANNEALING OF GAN LEDS WITH REDUCED PATTERN EFFECTS
doped quantum barrier
Alx1Iny1Ga₁-x1-y1N
undoped quantum well
Alx2Iny2Ga₁-x2-y2N
buffer layer
AlN buffer layer
AlN
N-type current spreading layer
AlGaN current spreading layer
AlGaN
InGaN current spreading layer
InGaN
quantum barrier doped concentration | 1000000000000000000–5000000000000000000 cm⁻³ | Alx1Iny1Ga₁-x1-y1N |
protective GaN cap layer thickness | 30–100 nm | GaN |
electron blocking layer doped concentration | 1000000000000000000–10000000000000000000 cm⁻³ | AlGaN |
electron blocking layer thickness | 0.1–0.5 um | AlGaN |
Thickness | 0–200 nm | — |
Thickness | 20–50 nm | — |
Duration | 10–15 minutes | — |
Duration | 20–30 minutes | — |
LASER ANNEALING OF GAN LEDS WITH REDUCED PATTERN EFFECTS
doped quantum barrier
Alx1Iny1Ga₁-x1-y1N
undoped quantum well
Alx2Iny2Ga₁-x2-y2N
buffer layer
AlN buffer layer
AlN
N-type current spreading layer
AlGaN current spreading layer
AlGaN
InGaN current spreading layer
InGaN
quantum barrier doped concentration | 1000000000000000000–5000000000000000000 cm⁻³ | Alx1Iny1Ga₁-x1-y1N |
protective GaN cap layer thickness | 30–100 nm | GaN |
electron blocking layer doped concentration | 1000000000000000000–10000000000000000000 cm⁻³ | AlGaN |
electron blocking layer thickness | 0.1–0.5 um | AlGaN |
Thickness | 0–200 nm | — |
Thickness | 20–50 nm | — |
Duration | 10–15 minutes | — |
Duration | 20–30 minutes | — |