Patent
US 8,809,086GaN-based layers (active layer sequence)
aluminium
Al
silver
Ag
platinum
Pt
molybdenum
Mo
SiC
silicon
Si
sapphire
AlN
MgO
AlGaN
silicon oxide
SiO₂
GaN-based layers (active layer sequence)
aluminium
Al
silver
Ag
platinum
Pt
molybdenum
Mo
SiC
silicon
Si
sapphire
AlN
MgO
AlGaN
silicon oxide
SiO₂
GaN-based layers (active layer sequence)
aluminium
Al
silver
Ag
platinum
Pt
molybdenum
Mo
SiC
silicon
Si
sapphire
AlN
MgO
AlGaN
silicon oxide
SiO₂
GaN-based layers (active layer sequence)
aluminium
Al
silver
Ag
platinum
Pt
molybdenum
Mo
SiC
silicon
Si
sapphire
AlN
MgO
AlGaN
silicon oxide
SiO₂